Three-Dimensional Micromachining by Machine Tools

Abstract Machining technologies for three-dimensional microproducts are summarized by focusing on the methods using tools. After a discussion on the problems and the basic strategy concerning micromachining, promising methods for machining convex and concave shapes are introduced and discussed with respect to their state of the art. The methods introduced include WEDG, EDM, grinding, cutting, WECG, MEDM, microdrilling, micromilling, MUSM, micropunching, MLBM, electrolyte jet ECM, micro electroforming and micro injection molding.