Practical Extensions to Cycle Time Approximations for the $G/G/m$-Queue With Applications

Approximate closed form expressions for the mean cycle time in a G/G/m-queue often serve as practical and intuitive alternatives to more exact but less tractable analyses. However, the G/G/m-queue model may not fully address issues that arise in practical manufacturing systems. Such issues include tools with production parallelism, tools that are idle with work in process, travel to the queue, and the tendency of lots to defect from a failed server and return to the queue even after they have entered production. In this paper, we extend popular approximate mean cycle time formulae to address these practical manufacturing issues. Employing automated data extraction algorithms embedded in software, we test the approximations using parameters gleaned from production tool groups in IBM's 200 mm semiconductor wafer fabricator.

[1]  Awi Federgruen,et al.  Queueing Systems with Service Interruptions , 1986, Oper. Res..

[2]  Ward Whitt,et al.  APPROXIMATIONS FOR THE GI/G/m QUEUE , 1993 .

[3]  P. Kuehn,et al.  Approximate Analysis of General Queuing Networks by Decomposition , 1979, IEEE Trans. Commun..

[4]  J. van der Eerden,et al.  Litho area cycle time reduction in an advanced 300mm semiconductor manufacturing line , 2006, The 17th Annual SEMI/IEEE ASMC 2006 Conference.

[5]  D. Gaver A Waiting Line with Interrupted Service, Including Priorities , 1962 .

[6]  Hirotaka Sakasegawa,et al.  An approximation formulaLq ≃α·ρβ/(1-ρ) , 1977 .

[7]  B. Avi-Itzhak,et al.  A Many-Server Queue with Service Interruptions , 1968, Oper. Res..

[8]  K. Connerney,et al.  Determining the capacity components of different classes of multi chamber tools , 2001, 2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (IEEE Cat. No.01CH37160).

[9]  Sanjay K. Bose,et al.  An Introduction to Queueing Systems , 2002, Springer US.

[10]  K. T. Marshall,et al.  Some Inequalities in Queuing , 1968, Oper. Res..

[11]  P. Naor,et al.  Some Queuing Problems with the Service Station Subject to Breakdown , 1963 .

[12]  J. A. Buzacott,et al.  On the approximations to the single server queue , 1980 .

[13]  J. Keilson Queues Subject to Service Interruption , 1962 .

[14]  John Frank Charles Kingman,et al.  The single server queue in heavy traffic , 1961, Mathematical Proceedings of the Cambridge Philosophical Society.

[15]  D. Kendall Some Recent Work and Further Problems in the Theory of Queues , 1964 .

[16]  J.R. Morrison,et al.  Performance Evaluation of Serial Photolithography Clusters: Queueing Models, Throughput and Workload Sequencing , 2006, The 17th Annual SEMI/IEEE ASMC 2006 Conference.

[17]  J. Matthews,et al.  How differentiating between utilization of effective availability and utilization of effective capacity leads to a better understanding of performance metrics , 2001, 2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (IEEE Cat. No.01CH37160).

[18]  B. Avi-Itzhak,et al.  A SEQUENCE OF SERVICE STATIONS WITH ARBITRARY INPUT AND REGULAR SERVICE TIMES , 1965 .

[19]  I. Adan,et al.  QUEUEING THEORY , 1978 .

[20]  Wallace J. Hopp,et al.  Factory physics : foundations of manufacturing management , 1996 .

[21]  J.H. Jacobs,et al.  Quantifying variability of batching equipment using effective process times , 2006, IEEE Transactions on Semiconductor Manufacturing.

[22]  Ciro D'Apice,et al.  Queueing Theory , 2003, Operations Research.

[23]  Shelby L. Brumelle Some Inequalities for Parallel-Server Queues , 1971, Oper. Res..

[24]  James R. Morrison,et al.  Performance evaluation of photolithography cluster tools , 2007, OR Spectr..

[25]  W. Whitt,et al.  The Queueing Network Analyzer , 1983, The Bell System Technical Journal.

[26]  W. Hopp,et al.  Using an optimized queueing network model to support wafer fab design , 2002 .

[27]  James R. Morrison,et al.  Cycle time approximations for the G/G/m queue with server failures and constant cycle time offsets with applications , 2006, ASMC 2006.

[28]  John A. Buzacott,et al.  Stochastic models of manufacturing systems , 1993 .

[29]  Jacobus E. Rooda,et al.  Characterization of operational time variability using effective process times , 2003 .

[30]  D. Kendall Some Problems in the Theory of Queues , 1951 .

[31]  WALLACE J. HOPP,et al.  Using an optimized queueing network model to support wafer fab design , 2002 .

[32]  L. Christie,et al.  Queuing with Preemptive Priorities or with Breakdown , 1958 .

[33]  D. P. Martin Capacity and cycle time-throughput understanding system (CAC-TUS) an analysis tool to determine the components of capacity and cycle time in a semiconductor manufacturing line , 1999, 10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295).