论文信息 - Fluid simulations of radio frequency glow discharges: Two‐dimensional argon discharge including metastables

Fluid simulations of radio frequency glow discharges: Two‐dimensional argon discharge including metastables

Two‐dimensional self‐consistent fluid simulations of a 13.56 MHz argon glow discharge including metastable species were performed as examples of a coupled glow‐discharge/neutral‐transport‐and‐reaction system. The electron density was found to peak in the radial direction. The metastable density profiles showed ‘‘hot spots’’ in both axial and radial directions.

D. J. Economou | Dimitris P. Lymberopoulos | Demetre J. Economou | D. Lymberopoulos

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