Excimer coated optics for medical setup at 193 nm

The obtaining and investigations of interference coatings in deep ultra violet at 193 nm for medical applications are considered. For successful using in excimer medical system each optical elements must have anti-reflective or high- reflective interference coatings that can be satisfied to medical setup. The general problem is how to produce the event distribution of primary laser irradiation at the nearest distance from eye behind the optical system with minimum losses. Besides all types of coatings must provide a high strength under laser irradiation. The conditions of producing interference coatings in this spectral region have some peculiarities: a limiting factor of the evaporation materials, film homogeneous along the surface of optics, and high laser strength. The processes of interaction between excimer laser photons and optical coatings influenced both on substrate and on film. In this connection the optical properties of some evaporated materials and pure substrates are observed. All films were produced by electron-beam evaporation. Optical absorption and laser strength of coated optics was analyzed as influence and variations of energies of ion-beam source.