Gate-all-around InGaAs nanowire FETS with peak transconductance of 2200μS/μm at 50nm Lg using a replacement Fin RMG flow
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A. Vais | C. Merckling | N. Waldron | N. Collaert | S. Sioncke | J. Franco | G. Boccardi | K. Barla | K. De Meyer | J. W. Maes | F. Sebaai | L. Teugels | D. van Dorp | M. Givens | H. C. Lin | K. Barla | N. Collaert | C. Merckling | N. Waldron | J. Franco | S. Sioncke | K. De Meyer | F. Sebaai | A. Vais | L. Nyns | J. Maes | Q. Xie | M. Givens | F. Tang | X. Jiang | G. Boccardi | L. Teugels | A. Opdebeeck | X. Zhou | L. Nyns | A. Opdebeeck | Q. Xie | F. Tang | X. Jiang | A. Sibaja Hernandez | A. S. Hernandez | E. Chiu | D. V. van Dorp | X. Zhou | E. Chiu | Y.-V Thean | H. Lin | Y.-V Thean
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