Ar laser annealing of sputtered Si films for TFT applications
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K. Y. Tong | Sun Zhen | L. F. Tsang | P. W. Chan | H. C. Cho | Y. W. Wong
[1] T. Serikawa,et al. Low-temperature fabrication of high-mobility poly-Si TFTs for large-area LCDs , 1989 .
[2] J. P. Gowers,et al. Excimer-laser-annealed poly-Si thin-film transistors , 1993 .
[3] Pole-Shang Lin,et al. The impact of scaling-down oxide thickness on poly-Si thin-film transistors' I-V characteristics , 1994 .