论文信息 - Co-integration of Ge detectors and Si modulators in an advanced Si photonics platform

Co-integration of Ge detectors and Si modulators in an advanced Si photonics platform

A Si photonics platform is described, co-integrating advanced passive components with Si modulators and Ge detectors. This platform is developed on a 200mm CMOS toolset, compatible with a 130nm CMOS baseline. The paper describes the process flow, and describes the performance of selected electro-optical devices to demonstrate the viability of the flow.

[1] P. Dumon,et al. Low-loss, low-cross-talk crossings for silicon-on-insulator nanophotonic waveguides. , 2007, Optics letters.

[2] J. Wouters,et al. Low-voltage, low-loss, multi-Gb/s silicon micro-ring modulator based on a MOS capacitor , 2012, OFC/NFOEC.

[3] W. Bogaerts,et al. Compact Single-Mode Silicon Hybrid Rib/Strip Waveguide With Adiabatic Bends , 2011, IEEE Photonics Journal.

[4] G. Roelkens,et al. Silicon-on-Insulator Polarization Rotator Based on a Symmetry Breaking Silicon Overlay , 2012, IEEE Photonics Technology Letters.

[5] P. Verheyen,et al. High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform. , 2010, Optics express.

[6] J. Wouters,et al. Lateral versus interdigitated diode design for 10 Gb/s low-voltage low-loss silicon ring modulators , 2012, 2012 Optical Interconnects Conference.

[7] D. Van Thourhout,et al. Compact Wavelength-Selective Functions in Silicon-on-Insulator Photonic Wires , 2006, IEEE Journal of Selected Topics in Quantum Electronics.

[8] Guy Brammertz,et al. High Quality Ge Virtual Substrates on Si Wafers with Standard STI Patterning , 2010 .

[9] P. Dumon,et al. Silicon microring resonators , 2012 .