MR 댐퍼를 이용한 반도체 장비용 마운트 시스템의 성능 평가

This paper presents performance evaluation of the magnetorheological (MR) damper designed for the semiconductor equipment mount system. In order to achieve this goal, a new type of MR damper is designed, modeled and manufactured. Its damping force characteristic is also experimentally evaluated. The mechanical model of semiconductor equipment with mount system is then derived by considering moving stage. A skyhook control algorithm with various control gains are designed for vibration control. In order to evaluate the effectiveness of the proposed control system, the simulation model is formulated by integrating the stage model with the proposed MR damper. Vibration control responses of the stage system such as vertical velocity are evaluated under impulse exciting conditions.