Interdisciplinary Teaching and Learning in a Semiconductor Processing Course *

An interdisciplinary course in semiconductor processing has been developed and successfully introduced into the chemical, materials, and electrical engineering curricula at San Jose State University. Student teams drawn from a range of engineering and scientific disciplines build microelectronic devices using a five-mask PMOS metal gate process, and perform open-ended experiments to improve this process. The team approach is set in the context of a start-up company culture and professional work environment to give students the opportunity to be actively engaged in constructing their own knowledge base. The wide spectrum of fields and experiences that students bring to the course mirror the highly interdisciplinary nature of microelectronics device processing which requires knowledge of physics, chemistry, and chemical, materials, and electrical engineering. The results from student surveys for the past three years (1995–97) were used to assess the success of this approach and to deduce the most important features for effective teamwork in this context. The elements for good team function and a rich overall learning experience include 1) contributions from and respect for each team member; 2) diverse majors, GPA, and work experiences; and 3) demonstrable leadership from one or two team members.