A micro-oscillation-driven energy harvester based on a flexible bipolar electret membrane with high output power

This paper reports the successful assembly of a micro-oscillation-driven energy harvester with bipolar electret membrane and dual air gap. Bipolar electret membrane, which has the electrostatic field with opposite poles on the top and bottom surfaces, is a flexible sandwiched FEP/THV/FEP membrane prepared via hot-pressing method and thermal-corona polarization technology. With a dual air gap oscillation structure, this energy harvester is equivalent to two variable capacitors in series and can produce a symmetrical resonance and induce capacitance variation to drive the charge flow, therefore generating current output. Output characteristic measurement of the energy harvester indicates that the output power presents an exponential dependence on oscillation driving force, and an extrapolated output power of 11.12 mW could be generated when the oscillation driving force is 2 N. Moreover, the output power displays a linear correlation with the electret membrane area. The influence of oscillation frequency on the output power results in a symmetric distribution of output power around 86 Hz when the oscillation driving force is 0.5 N, with the maximum output power of 14.14 μW. It is also concluded that the oscillation frequency for peak output power shifts to a higher level with the increase of average surface potential, whereas it drifts to a lower level with the enlarging electret membrane area. This novel micro-oscillation-driven energy harvester provides an up-to-date idea for electret application in self-powered sensor systems.

[1]  N. Kasagi,et al.  The development of a high-performance perfluorinated polymer electret and its application to micro power generation , 2008 .

[2]  J. Reboud,et al.  A cm scale electret-based electrostatic wind turbine for low-speed energy harvesting applications , 2016 .

[3]  Daigo Miki,et al.  A MEMS electret generator with electrostatic levitation for vibration-driven energy-harvesting applications , 2010 .

[4]  M. Weisskopf,et al.  NEW METHOD OF MEASURING THE AVERAGE THERMAL VELOCITY OF ATOMS , 1970 .

[5]  M. Lei,et al.  Unique Charge Storage Characteristics of FEP/THV/FEP Sandwich Electret Membrane Polarized by Thermally Charging Technology , 2014 .

[6]  Einar Halvorsen,et al.  Design and Modeling of a Patterned-Electret-Based Energy Harvester for Tire Pressure Monitoring Systems , 2012, IEEE/ASME Transactions on Mechatronics.

[7]  Huimin Yu,et al.  Surface charge self-recovering electret film for wearable energy conversion in a harsh environment , 2016 .

[8]  Zhong Lin Wang,et al.  Self-Powered Triboelectric Micro Liquid/Gas Flow Sensor for Microfluidics. , 2016, ACS nano.

[9]  Xiaodong He,et al.  Electret-based microfluidic power generator for harvesting vibrational energy by using ionic liquids , 2015 .

[10]  Y. Tai,et al.  Iop Publishing Journal of Micromechanics and Microengineering Parylene-based Electret Power Generators , 2022 .

[11]  Xiao Hu,et al.  A three-dimensional electret-based micro power generator for low-level ambient vibrational energy harvesting , 2014 .

[12]  G. Sessler,et al.  Charge distribution in Teflon FEP (fluoroethylenepropylene) negatively corona‐charged to high potentials , 1992 .

[13]  Jie Chen,et al.  A nanogenerator for harvesting airflow energy and light energy , 2014 .

[14]  Yuji Suzuki,et al.  Recent progress in MEMS electret generator for energy harvesting , 2011 .

[15]  Tao Dong,et al.  Power generation from conductive droplet sliding on electret film , 2012 .

[16]  P. Gasnier,et al.  An electret-based aeroelastic flutter energy harvester , 2015 .

[17]  Jie Chen,et al.  A Triboelectric Generator Based on Checker‐Like Interdigital Electrodes with a Sandwiched PET Thin Film for Harvesting Sliding Energy in All Directions , 2015 .

[18]  M. Ataka,et al.  Soft Electret Gel For Low Frequency Vibrational Energy Harvesters , 2015 .

[19]  Wen-Jong Wu,et al.  Study and application of free-form electret actuators , 2012, IEEE Transactions on Dielectrics and Electrical Insulation.

[20]  Bin Hu,et al.  Stretchable Self‐Powered Fiber‐Based Strain Sensor , 2015 .

[21]  Xiao Hu,et al.  Sandwich-structured two-dimensional MEMS electret power generator for low-level ambient vibrational energy harvesting , 2015 .

[22]  Zhong Lin Wang,et al.  A paper-based nanogenerator as a power source and active sensor , 2013 .

[23]  Jun Zhou,et al.  Self-Powered Human-Interactive Transparent Nanopaper Systems. , 2015, ACS nano.

[24]  B. Hu,et al.  Sandwiched Composite Fluorocarbon Film for Flexible Electret Generator , 2016 .

[25]  Fei Wang,et al.  Electrostatic energy harvesting device with out-of-the-plane gap closing scheme , 2013, International Conference on Solid-State Sensors, Actuators and Microsystems.