Microstructure Technology for Optical Component Fabrication

Technologies and fabrication methods are often responsible for the success of products, because its price, functionality, size, and durability depend on it. Usually, technological reasons may lead to a time lag of years or even tens of years between the discovery and the first proof or the first commercial use of a physical effect. Therefore, the technologies play a key role in our technical life and we need to focus also on the fabrication technologies in a general discussion on microoptical elements.

[1]  Ernst-Bernhard Kley,et al.  Fabrication technique for high-aspect-ratio gratings , 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[2]  Guy Voirin,et al.  One-step 3D shaping using a gray-tone mask for optical and microelectronic applications , 1994 .

[3]  Ernst-Bernhard Kley,et al.  E-beam lithography: an efficient tool for the fabrication of diffractive and micro-optical elements , 1997, Photonics West.

[4]  Ernst-Bernhard Kley,et al.  E-beam lithography and optical near-field lithography: new prospects in fabrication of various grating structures , 2003, SPIE Optics + Photonics.

[5]  Ernst-Bernhard Kley,et al.  Fabrication and application of subwavelength gratings , 1997, Photonics West.

[6]  Ting Chen,et al.  Micro-Optics Fabrication by Ink-Jet Printers , 2001 .

[7]  Saskia Biehl,et al.  Refractive Microlens Fabrication by Ink-Jet Process , 1998 .

[8]  Klaus Reimer,et al.  Progress in gray-tone lithography and replication techniques for different materials , 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[9]  Ernst-Bernhard Kley,et al.  Fabrication of micro-optical surface profiles by using grayscale masks , 1998, Photonics West.

[10]  G. Connell,et al.  Technique for monolithic fabrication of microlens arrays. , 1988, Applied optics.

[11]  Lars-Christian Wittig,et al.  Alternative method of gray-tone lithography with potential for the fabrication of combined continuous 3D surface profiles and subwavelength structures , 2003, SPIE Optics + Photonics.

[12]  Michael T. Gale,et al.  Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists , 1994 .

[13]  Lars Erdmann,et al.  Technique for monolithic fabrication of silicon microlenses with selectable rim angles , 1997 .

[14]  G. M. Morris,et al.  Antireflection structured surfaces for the infrared spectral region. , 1993, Applied optics.

[15]  Ernst-Bernhard Kley,et al.  Approximation of refractive micro-optical profiles by minimal surfaces , 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[16]  Wilhelm Stork,et al.  Zero-order gratings used as an artificial distributed index medium , 1992 .

[17]  Volker Wittwer,et al.  Antireflective transparent covers for solar devices , 2000 .

[18]  Hans Peter Herzig,et al.  Replicated arrays of hybrid elements for application in a low-cost micro-spectrometer array , 2000 .

[19]  Volker Wittwer,et al.  Subwavelength-structured antireflective surfaces on glass , 1999 .

[20]  Michael T. Gale,et al.  The Fabrication Of Fine Lens Arrays By Laser Beam Writing , 1983, Other Conferences.

[21]  M. Hutley,et al.  The manufacture of microlenses by melting photoresist , 1990 .

[22]  Philippe Lalanne,et al.  Design and fabrication of blazed binary diffractive elements with sampling periods smaller than the structural cutoff , 1999 .

[23]  Robert E. Knowlden,et al.  Effect of refractive microlens array fabrication parameters on optical quality , 1993, Optics & Photonics.

[24]  S. Haselbeck,et al.  Microlenses fabricated by melting a photoresist on a base layer , 1993 .

[25]  Sharlene A. Liu,et al.  Polar-coordinate laser writer for binary optics fabrication , 1990, Photonics West - Lasers and Applications in Science and Engineering.

[26]  P. Chavel,et al.  Blazed binary subwavelength gratings with efficiencies larger than those of conventional échelette gratings. , 1998, Optics letters.

[27]  Hans Peter Herzig,et al.  Holographically recorded gratings on microlenses for a miniaturized spectrometer array , 2000 .

[28]  D. W. Ricks.  Scattering from diffractive optics , 1993, Optics + Photonics.

[29]  H. Nishihara,et al.  Blazed gratings and Fresnel lenses fabricated by electron-beam lithography. , 1982, Optics letters.

[30]  Tina Clausnitzer,et al.  Polarizing metal stripe gratings for a micro-optical polarimeter , 2003, SPIE Optics + Photonics.

[31]  Ernst-Bernhard Kley,et al.  Fabrication of glass lenses by melting technology , 2001, SPIE Optics + Photonics.

[32]  Sing H. Lee,et al.  Fabrication of diffractive optical elements using a single optical exposure with a gray level mask , 1995 .

[33]  Michael T. Gale,et al.  Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresist , 1994, Other Conferences.

[34]  Ernst-Bernhard Kley,et al.  Intermittence effect in electron beam writing , 2001 .