Fabrication of c‐oriented HgBa2Ca2Cu3O8+δ superconducting thin films

Superconducting Hg‐based cuprate thin films have been fabricated on (100) SrTiO3 substrate using rf sputtering and post‐Hg‐vapor annealing. These films are dominated by c‐axis‐oriented Hg‐1223 phase as indicated by x‐ray diffraction and SQUID measurements. Using four‐probe technique, the Tc,onset was found to be 130–132 K and Jc was up to 8.5×104 A/cm2 at 77 K and zero field.