论文信息 - Impact of bottom electrode and SrxTiyOz film formation on physical and electrical properties of metal-insulator-metal capacitors - 字舞流文

Impact of bottom electrode and SrxTiyOz film formation on physical and electrical properties of metal-insulator-metal capacitors

H. Bender | K. Opsomer | B. Govoreanu | L. Altimime | J. Kittl | M. Popovici | J. Swerts | B. Kaczer | V. Afanas’ev | I. Debusschere | A. Belmonte | P. Favia | C. Vrancken | Min-Soo Kim | C. Demeurisse | K. Tomida | W. Wang | M. Pawlak