论文信息 - Monolythically Integrated Optical Distance Measurement Sensor with Double-Cathode Photodetector

Monolythically Integrated Optical Distance Measurement Sensor with Double-Cathode Photodetector

The presented distance measurement sensor is implemented as an opto-electronic integrated circuit (OEIC) in a modified 0.6 mum BiCMOS technology. The measurement principle is based on the determination of the phase shift between a received optical signal and an electrical modulation signal. The newly developed double-cathode photodetector (DCP) performing the opto-electronic correlation and the all-passive read-out circuit are implemented on a single chip. By using the DCP the fill factor is greatly improved compared to K. Oberhauser et al (2006). For an optical active area of Apd = 115times120 mum2 a very high fill factor of etafill = 67 % is reached. The sensor is capable of measuring distances up to sd = 6.2 m with an optical transmitted power of Popt = 1.2 mW at a wavelength of lambda = 650 nm.

A. Nemecek | K. Oberhauser | G. Zach | H. Zimmermann

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