Morphological and thickness analysis for PMMA spin coated films

.. . − c h . The reason of changes in the constant coefficients in different equations is distinct by comparing them with different solvents. This comparison shows that these constant coefficients in above equation depend on solvent type and the vaporization of solvent. The relationship between viscosity and concentration has been investigated and defined that viscosity can indirectly cause increasing the exponent of concentration or directly entered in equation without influencing in exponent of concentration that both of them cause the same result. Finally the surface morphology is related to the effective parameters in thickness and their effects on surface uniformity are discussed. It is shown that the factors which cause an increase in thickness may reduce the surface quality which limits the thickness of the layer produced by this method. Therefore, for a desired thickness, attention should be paid to the influence of different parameters on the surface uniformity; and optimum values should be chosen for controlling both thickness and surface morphology. (Received