Monolithic Optical Transceivers in 65 nm Bulk CMOS

We present the integration of optical passive and active components next to millions of nano-scale bulk silicon transistors through a single deposited layer of polysilicon on silicon oxide islands. We demonstrate 10 Gb/s monolithic O-band optical transceivers on this platform.

[1]  Rajeev J. Ram,et al.  Single-chip microprocessor that communicates directly using light , 2015, Nature.

[2]  Jeffrey A. Kash,et al.  Optical interconnects for high performance computing , 2012, 2009 Asia Communications and Photonics conference and Exhibition (ACP).

[3]  R. J. Ram,et al.  Depletion-based optical modulators in a bulk 65 nm CMOS platform , 2016, 2016 Optical Fiber Communications Conference and Exhibition (OFC).

[4]  Yusuf Leblebici,et al.  29.1 A 64Gb/s 1.4pJ/b NRZ optical-receiver data-path in 14nm CMOS FinFET , 2017, 2017 IEEE International Solid-State Circuits Conference (ISSCC).

[5]  Min Yang,et al.  A 90nm CMOS integrated Nano-Photonics technology for 25Gbps WDM optical communications applications , 2012, 2012 International Electron Devices Meeting.

[6]  Vladimir Stojanovic,et al.  29.3 A 40Gb/s PAM-4 transmitter based on a ring-resonator optical DAC in 45nm SOI CMOS , 2017, 2017 IEEE International Solid-State Circuits Conference (ISSCC).

[7]  Rajeev J Ram,et al.  Polycrystalline silicon ring resonator photodiodes in a bulk complementary metal-oxide-semiconductor process. , 2014, Optics letters.

[8]  Michael R. Watts,et al.  An ultra low power 3D integrated intra-chip silicon electronic-photonic link , 2015, 2015 Optical Fiber Communications Conference and Exhibition (OFC).

[9]  Chen Sun,et al.  A Monolithically-Integrated Chip-to-Chip Optical Link in Bulk CMOS , 2015, IEEE J. Solid State Circuits.