Poiseuille number for the fully developed laminar flow through hexagonal ducts etched in 〈1 0 0〉 silicon ☆

This paper focuses on a main subject encountered in the design process of the hexagonal ducts etched in silicon, namely, the achievement of the Poiseuille number Po for the velocity field of the fully developed laminar flow. The particular shape of the duct is determined by silicon technology. This type of duct is the main part of a structure for the determination of fluid and flow parameters. We develop a procedure for obtaining Po versus the aspect ratio of the hexagonal cross section. The validity of this procedure is proven using different shapes of cross sections. We underline the merit of this procedure, namely, its applicability using a commercial software package in a rather straightforward manner. The results presented in this paper might be adapted for many other situations encountered both in micro and macro world where devices containing ducts having various non-circular cross sections are present.

[1]  R. Shah Laminar flow friction and forced convection heat transfer in ducts of arbitrary geometry , 1975 .

[2]  C. Wang Laminar flow in certain ducts of symmetric cross section , 1999 .

[3]  R. M. Manglik,et al.  Fully developed forced convection through trapezoidal and hexagonal ducts , 1999 .

[4]  N. Damean,et al.  Measurement concepts: from classical transducers to new MEMS , 2000 .

[5]  G. Mala,et al.  Pressure-driven water flows in trapezoidal silicon microchannels , 2000 .

[6]  R. Shah Laminar Flow Forced convection in ducts , 1978 .

[7]  J. Zemel,et al.  Liquid transport in micron and submicron channels , 1990 .

[8]  N. Damean,et al.  A study of fluid flow in a MEMS designed for the determination of fluid and flow characteristics , 2000, Proceedings of the 17th IEEE Instrumentation and Measurement Technology Conference [Cat. No. 00CH37066].

[9]  Dongqing Li,et al.  Flow characteristics of water in microtubes , 1999 .

[10]  R. S. Dhariwal,et al.  Experimental and Numerical Investigation Into the Flow Characteristics of Channels Etched in 〈100〉 Silicon , 1998 .

[11]  Jan H. J. Fluitman,et al.  Towards integrated microliquid handling systems , 1994 .

[12]  George Em Karniadakis,et al.  Rarefaction and Compressibility Effects in Gas Microflows , 1996 .

[13]  Gijsbertus J.M. Krijnen,et al.  A micromachined pressure/flow-sensor , 1999 .

[14]  J. Branebjerg,et al.  A micromachined flow sensor for measuring small liquid flows , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[15]  R. Viskanta,et al.  Three-dimensional conjugate heat transfer in the microchannel heat sink for electronic packaging , 2000 .

[16]  Jan H. J. Fluitman,et al.  Micro-liquid flow sensor , 1993 .