Field‐emitter array performance enhancement using hydrogen glow discharges

The changes in the current‐voltage characteristics and electron emission spatial distribution of microfabricated field emitters following exposure to hydrogen low‐pressure glow discharges have been investigated. The hydrogen discharge was found to result in a work function decrease typically between 0.5 and 1.5 eV following a dose of 1018–1019 ions/cm2. The net result is a reduction in the operating voltage and an improvement in the spatial uniformity of the electron emission.