Silicon Mach-Zehnder modulator of extinction ratio beyond 10dB at 10.0–12.5Gbps

Silicon Mach-Zehnder modulators with reduced series resistance in lateral PN junction rib-waveguide phase shifters are characterized in eye-diagram measurements. The modulators reveal extinction ratio beyond 10dB at 10.0–12.5Gbps, approaching lithium-niobate modulators in high-speed performance.