Self-limiting atomic layer deposition of barium oxide and barium titanate thin films using a novel pyrrole based precursor
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F. Prinz | Joonsuk Park | J. Torgersen | M. Winterkorn | S. Acharya | C. Schildknecht | S. Walch | P. Schindler | Shicheng Xu | T. Usui | Yongmin Kim | A. Dadlani