Flexible micro sensor for in-situ monitoring temperature and voltage of coin cells

Abstract In this study, a novel integrated two-in-one flexible micro sensors are fabricated using the micro-electro-mechanical systems (MEMS) process for in-situ monitoring of temperature and voltage in a coin cell. Temperatures fluctuate in a coin cell, as evidenced by the inner temperature changing more rapidly than the outer one. Additionally, monitoring the inner temperature is faster than the outer one. Charging and discharging causes non-uniform distributions of the inner voltage.

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