Dynamical modeling and characterization of a surface micromachined microengine

The practical implementation of the surface micromachined microengine [1,2] to perform useful microactuation tasks requires a thorough understanding of the dynamics of the engine. This understanding is necessary in order to create appropriate drive signals, and to experimentally measure fundamental quantities associated with the engine system. We have developed and applied a dynamical model of the microengine and used it to accomplish three objectives: (1) drive inertial loads in a controlled fashion, i.e. specify and achieve a desired time dependent angular position of the output gear,( 2) minimize stress and frictional forces during operation, and (3) as a function of time, experimentally determine forces associated with the output gear, such as the load torque being applied to the output gear due to friction.