论文信息 - First-Principles Study of a Full Cycle of Atomic Layer Deposition of SiO2 Thin Films with Di(sec-butylamino)silane and Ozone - 字舞流文

First-Principles Study of a Full Cycle of Atomic Layer Deposition of SiO2 Thin Films with Di(sec-butylamino)silane and Ozone

Hansong Cheng | R. Pearlstein | B. Han | B. Han | A. Derecskei-Kovacs | H. Chandra | Manchao Xiao | X. Lei | M. O'neill | Liang Huang