Design, fabrication, and testing of micromachined silicone rubber membrane valves
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[1] O. Tabata,et al. Mechanical property measurements of thin films using load-deflection of composite rectangular membranes , 1989 .
[2] H. Elderstig,et al. A Pneumatically Actuated Micro Valve With A Silicone Rubber Membrane For Integration With Fluid-handling Systems , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.
[3] P. W. Barth,et al. Silicon Microvalves For Gas Flow Control , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.
[4] Kensall D. Wise,et al. Thermally driven phase-change microactuation , 1995 .
[5] Olivier Thierry Guenat,et al. High-density arrays of valves and interconnects for liquid switching , 1996 .
[6] Yu-Chong Tai,et al. Gas-phase silicon etching with bromine trifluoride , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
[7] Yu-Chong Tai,et al. Gas-phase Silicon Etching With Bromine Trifluoride , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
[8] W. Heineman,et al. Development of A Generic Microfluidic System for Electrochemical Immunoassay-Based Remote Bio/Chemical Sensors , 1998 .
[9] Chih-Ming Ho,et al. Micro balloon actuators for aerodynamic control , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.
[10] Kevin Barraclough,et al. I and i , 2001, BMJ : British Medical Journal.