Q -Optimized Lateral Free-Free Beam Micromechanical Resonators

Laterally vibrating free-free beam micromechanical resonators have been demonstrated that utilize second-mode flexural supports and optimal dc-bias application to suppress anchor dissipation and thereby attain Q’s greater than 10,000 at 10.47 MHz, while eliminating some of the key deficiencies associated with previous vertical-mode resonators. In addition to demonstrating lateral FF-beams, this work utilizes these resonators to quantify the degree to which the use of energy isolating supports actually influences the Q of this device.