论文信息 - Comparative study of electron beam–gas interaction in an SEM operating at pressures up to 300Pa - 字舞流文

Comparative study of electron beam–gas interaction in an SEM operating at pressures up to 300Pa

B. Khelifa | C. Mathieu | A. Kadoun | R. Belkorissat

[1] A. Donald,et al. Amplification measurements of alternative imaging gases in environmental SEM , 1997 .

[2] David C. Joy,et al. Monte Carlo Modeling for Electron Microscopy and Microanalysis , 1995 .

[3] J. Shah,et al. Amplification and noise in high‐pressure scanning electron microscopy , 1993 .

[4] A. Farley,et al. Primary considerations for image enhancement in high‐pressure scanning electron microscopy , 1990 .

[5] P. R. Barker,et al. Electron scattering by gas in the scanning electron microscope , 1979 .

[6] G. H. Smith,et al. A new calculation of electron scattering cross sections and a theoretical discussion of image contrast in the electron microscope , 1962 .

[7] E. Oho,et al. Image quality improvement using helium gas in low voltage variable pressure scanning electron microscopy. , 2000, Journal of electron microscopy.

[8] G. Danilatos. Foundations of Environmental Scanning Electron Microscopy , 1988 .

[9] J. Kessler,et al. Die Ortsverteilung mittelschneller Elektronen bei Mehrfachstreuung , 1963 .