Silver-doped germanium sulphide glass channel waveguides fabricated by chemical vapour deposition and photo-dissolution process

Germanium sulphide glass thin films have been fabricated by chemical vapour deposition directly on commercial glass substrates. Silver (Ag)-doped channel waveguide structures were then prepared in a three step process, first channels were patterned in photo-resist, next a Ag thin film was deposited on the patterned waveguide by thermal evaporation, and finally the silver ions were doped into germanium sulphide glass by a photo-dissolution process. The refractive index of germanium sulphide increased by about 0.02 through the photo-dissolution process. The loss of the channel waveguides measured at 632.8 nm was 0.63±0.05 dB/cm.

[1]  T. Kawaguchi.  Thermodynamic Consideration for Photoinduced Surface Deposition of Ag–As–S Glasses , 2001 .

[2]  Hong-Bay Chung,et al.  On Ag-doping in amorphous Sb2S3 thin film by HeNe and HeCd laser exposures and its optical characteristics , 2001 .

[3]  A. Owen,et al.  The effect of heat on the metal photodissolution process in amorphous As40S60 films , 1996 .

[4]  T. Wágner,et al.  Ag–Sb–S amorphous chalcogenide thin films prepared by optically induced dissolution and diffusion of silver , 2003 .

[5]  Keiji Tanaka,et al.  Photoinduced processes in chalcogenide glasses , 1996 .

[6]  S. Maruno,et al.  Photoinduced surface deposition of metallic silver : basic research for its application to optical recording devices , 1994 .

[7]  S. Maruno,et al.  Reversible photowriting and thermal erasing of Ag patterns on Ag-rich Ag-Ge-S films , 1994 .

[8]  T. Wágner,et al.  Photo-induced dissolution effect in Ag/As33S67 multilayer structures and its potential application , 2000 .

[9]  M. Kozicki,et al.  Silver incorporation in Ge-Se glasses used in programmable metallization cell devices , 2002 .

[10]  D. Hewak,et al.  Deposition and characterization of germanium sulphide glass planar waveguides. , 2004, Optics express.

[11]  Maria Mitkova,et al.  Thermal and photodiffusion of Ag in S-rich Ge-S amorphous films , 2004 .

[12]  T. Kawaguchi.  Photoinduced surface deposition of Ag on Ag-rich Ag–Ge–S films: Optimal Ag content and film thickness for applications in optical recording devices , 1998 .

[13]  Photoinduced diffusion of Zn in chalcogenide glassy films , 2003 .

[14]  Peter Ewen,et al.  Controlling the optical constants of thermally-evaporated Ge10Sb30S60 chalcogenide glass films by photodoping with silver , 2000 .

[15]  Michel Ribes,et al.  Silver sulfide based glasses (I). Glass forming regions, structure and ionic conduction of glasses in GeS2Ag2S and GeS2Ag2SAgI systems , 1983 .

[16]  R. Swanepoel.  Determination of the thickness and optical constants of amorphous silicon , 1983 .

[17]  C. Lucas.  X-ray scattering studies of the photodissolution of silver in chalcogenide glasses , 1991 .

[18]  P. Villares,et al.  On the Ag-photodissolution phenomenon in As0.35S0.65 chalcogenide glass films , 1996 .

[19]  T. Wágner,et al.  Kinetics of the thermally and photoinduced solid state reaction of Ag with As33S67 films , 2000 .

[20]  T. Wágner,et al.  Holographic grating preparation in Ag/As 30 S 70 multilayer and bilayer structures , 2003 .

[21]  J. Horton,et al.  Photodiffusion of silver in germanium-sulfur compounds studied by AFM, nanoindentation and RBS methods , 2003 .

[22]  V. Kravets,et al.  Infrared absorption of Ag- and Cu-photodoped chalcogenide films , 1996 .

[23]  S. Maruno,et al.  Composition dependence of Ag photodoping into amorphous Ge‐S films , 1992 .

[24]  P. Rudman,et al.  The kinetics of photodissolution of Ag in amorphous As2S3 films , 1976 .

[25]  S. Maruno,et al.  Optical, electrical, and structural properties of amorphous Ag-Ge-S and Ag-Ge-Se films and comparison of photoinduced and thermally induced phenomena of both systems , 1996 .

[26]  S. Maruno,et al.  Photoinduced surface deposition of metallic silver in Ag‐As‐S glasses , 1995 .