An optically programmable SoC for an autonomous mm3-sized microrobot

A microrobot is a robot under a few cubic millimeters in size. Miniaturizing its components, power source, sensors and actuators, has proven challenging. As a consequence, few autonomous microrobots have been reported until recently [1–3]. These are simple mobile platforms, without sensors on board. Their electronics are basically focused on motion. I-SWARM is the first autonomous microrobot, 23mm3 and 70mg, designed to move, sense, take decisions, communicate and work in cooperation with other I-SWARM microrobots [4]. The area and weight of a microrobot are critical and limits the use of off-the-shelf components. So, it is required to integrate in a unique chip all the electronics, including the clock source, the POR and the voltage regulators.

[1]  K. Pister,et al.  An SOI process for fabrication of solar cells, transistors and electrostatic actuators , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[2]  Erik Edqvist,et al.  Design and manufacturing considerations of low-voltage multilayer P(VDF-TrFE) actuators , 2009 .

[3]  Robert J. Wood,et al.  Milligram-scale high-voltage power electronics for piezoelectric microrobots , 2009, 2009 IEEE International Conference on Robotics and Automation.

[4]  D. Ruffieux.  A low power ASIC for the control of a mobile micro–actuator array , 1999 .

[5]  K. Pister,et al.  Solar powered 10 mg silicon robot , 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.

[6]  M. Takeda,et al.  Applications of MEMS to industrial inspection , 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).

[7]  Mark Ingels,et al.  A CMOS 18 THz/spl Omega/ 248 Mb/s transimpedance amplifier and 155 Mb/s LED-driver for low cost optical fiber links , 1994 .

[8]  Robert Bogue,et al.  Microrobots and nanorobots: a review of recent developments , 2010, Ind. Robot.

[9]  Urban Simu,et al.  A review on actuation principls for few cubic millimeter sized mobile micro-robots , 2006 .

[10]  T. Fukuda,et al.  Microrobot and applications , 1993, Proceedings of IEEE 2nd International Workshop on Emerging Technologies and Factory Automation (ETFA '93).

[11]  Garrett S. Rose,et al.  Designs for Ultra-Tiny, Special-Purpose Nanoelectronic Circuits , 2007, IEEE Transactions on Circuits and Systems I: Regular Papers.

[12]  Raimon Casanova,et al.  A Wake-Up Circuit With Temperature Compensated Clock In 1.2V-0.13 μm CMOS Technology , 2007, 2007 14th IEEE International Conference on Electronics, Circuits and Systems.

[13]  B. Legrand,et al.  Complete System for Wireless Powering and Remote Control of Electrostatic Actuators by Inductive Coupling , 2007, IEEE/ASME Transactions on Mechatronics.

[14]  Josep Samitier,et al.  Design and validation of the control circuits for a micro-cantilever tool for a micro-robot , 2009 .

[15]  Göran Stemme,et al.  A robust micro conveyer realized by arrayed polyimide joint actuators1A robust micro conveyer realiz , 2000 .

[16]  Kristofer S. J. Pister,et al.  Design of an Autonomous Jumping Microrobot , 2022 .

[17]  Ángel Diéguez,et al.  An Improved Temperature Compensation Technique for Current Biasing , 2007, 2007 IEEE International Symposium on Circuits and Systems.

[18]  Jean-Marc Breguet,et al.  Solar Cell Powering with Integrated Global Positioning System for mm3 Size Robots , 2006, 2006 IEEE/RSJ International Conference on Intelligent Robots and Systems.

[19]  A. M. Flynn,et al.  Gnat Robots (And How They Will Change Robotics) , 1987 .

[20]  D. Collard,et al.  A 100 V-IC for the remote powering and control of a microrobot using an electrostatic ciliary motion system , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[21]  Stefan Johansson,et al.  Gentle dry etching of P(VDF-TrFE) multilayer micro actuator structures by use of an inductive coupled plasma , 2008 .

[22]  James D. McLurkin.  Stupid robot tricks : a behavior-based distributed algorithm library for programming swarms of robots , 2004 .

[23]  Luigi Fortuna,et al.  A CNN-based chip for robot locomotion control , 2005, IEEE Transactions on Circuits and Systems I: Regular Papers.