The growth mechanism and supercapacitor study of anodically deposited amorphous ruthenium oxide films

Abstract In the present study, ruthenium oxide (RuO 2 ) thin films were deposited on the stainless steel (s.s.) substrates by anodic deposition. The nucleation and growth mechanism of electrodeposited RuO 2 film has been studied by cyclic voltammetry (CV) and chronoamperometry (CA). The deposited films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM) and energy dispersive analysis by X-rays (EDAX) for structural, morphological, and compositional studies. The electrochemical supercapacitor study of ruthenium oxide thin films have been carried out for different film thicknesses in 0.5 M H 2 SO 4 electrolyte. The highest specific capacitance was found to be 1190 F/g for 0.376 mg/cm 2 film thickness.

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