论文信息 - Air-annealing effects on SiO2/ITO coating

Air-annealing effects on SiO2/ITO coating

Indium tin oxide (ITO) thin film with SiO2 protective upper layer prepared by electron beam evaporation was annealed in air up to 300°C. Evolution of transmittance, resistance and surface morphology of this SiO2/ITO coating was studied. Transmittance in visible and near-infrared range both increased while absorption edge exhibited red shift after annealing. Resistance increased monotonously with rising annealing temperature, yet increments became smaller at temperatures above 270°C. Micron-defects were observed on the surface of SiO2/ITO coating after annealing. Enhancement of crystallinity of ITO layer at high temperatures was thought to be responsible for these morphology and resistance evolutions.

[1] I. Hamberg,et al. Theoretical Model For The Optical Properties Of In2O3: Sn Films In The 0.3-50-µm range , 1985, Optics & Photonics.

[2] C. Daube,et al. Dependence of oxygen flow on optical and electrical properties of DC-magnetron sputtered ITO films , 1998 .

[3] Corey M. Dunsky,et al. Laser patterning of ITO in flat panel display manufacturing , 2006, SPIE LASE.

[4] Changxin Xiong,et al. Research on ITO transparent electromagnetic shielding coatings for E-O system , 2007, International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT).

[5] A. Mendoza-Galván,et al. Effects of air annealing on the optical, electrical, and structural properties of indium-tin oxide thin films , 2009 .

[6] Alireza Salehi,et al. Annealing effects on opto-electronic properties of sputtered and thermally evaporated indium-tin-oxide films , 1998 .

[7] Pedro Barquinha,et al. Influence of post-annealing temperature on the properties exhibited by ITO, IZO and GZO thin films , 2007 .

[8] Peter N. Gorley,et al. Transparent conductive oxides of tin, indium, and cadmium for solar cell applications , 2007, Photonics North.

[9] Jeong-Ik Lee,et al. Fabrication of organic light-emitting diodes using ITO anodes grown on polyethersulfone (PES) substrates by pulse-laser deposition , 2005, SPIE OPTO.