NODAS 1.3 - Nodal Design Of Actuators And Sensors

A circuit-level methodology for top-down hierarchical design and nodal simulation of microelectromechanical systems (MEMS) is presented. An abstract layout view is introduced as a geometrically intuitive MEMS representation that is transformed into a schematic suitable for behavioral simulation. Suspended-MEMS inertial sensors, resonant actuators and filters are designed using a small set of geometrically parameterized plate, beam, gap and anchor elements. Effects of manufacturing variations are evaluated by simply changing parameter values of the elements.

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