An EOPN-Based Real-Time Scheduling Simulation Platform of Wafer Fabrication System

According to unique complicated features,this paper proposed a real-time scheduling simulation platform for the semiconductor wafer fabrication system(SWFS) with object-oriented technology.Based on the high-fidelity system model established by an extended object-oriented Petri net(EOPN) modeling mechanism,the simulation platform may not only simulate the complex wafer fabrication process,but also be able to integrate various types of real-time scheduling and dispatching policies,and compute,test and evaluate corresponding system performance.The development of simulation platform provides positive support for related research of modeling,schedule and control in the semiconductor manufacturing field.