A Four-Quadrant PVDF Transducer for Surface Acoustic Wave Detection

In this paper, a polyvinylidene fluoride (PVDF) piezoelectric transducer was developed to detect laser-induced surface acoustic waves in a SiO2-thin film–Si-substrate structure. In order to solve the problems related to, firstly, the position of the probe, and secondly, the fact that signals at different points cannot be detected simultaneously during the detection process, a four-quadrant surface acoustic wave PVDF transducer was designed and constructed for the purpose of detecting surface acoustic waves excited by a pulse laser line source. The experimental results of the four-quadrant piezoelectric detection in comparison with the commercial nanoindentation technology were consistent, the relative error is 0.56%, and the system eliminates the piezoelectric surface wave detection direction deviation errors, improves the accuracy of the testing system by 1.30%, achieving the acquisition at the same time at different testing positions of the sample.

[1]  Oleg Kolosov,et al.  Anisotropic elastic characterization of surfaces from 2 MHz to 20 GHz , 1998 .

[2]  Stergios Logothetidis,et al.  Nanoscale effects on the nanomechanical properties of multifunctional materials , 2005 .

[3]  Lewis F. Brown.  New developments in piezoelectric polymer ultrasound transducers and transducer systems , 1992, SPIE Optics + Photonics.

[4]  Daniele Passeri,et al.  Local indentation modulus characterization via two contact resonance frequencies atomic force acoustic microscopy , 2007 .

[5]  Osamu Tabata,et al.  Monolithic pyroelectric infrared image sensor using PVDF thin film , 1997 .

[6]  Nils Kroemer,et al.  Ultrasonic transducer with piezoelectric polymer foil , 1991 .

[7]  Shefford P. Baker,et al.  Between nanoindentation and scanning force microscopy: measuring mechanical properties in the nanometer regime , 1997 .

[8]  Bharat Bhushan,et al.  New technique for studying nanoscale friction at sliding velocities up to 200mm∕s using atomic force microscope , 2006 .

[9]  Osamu Takeuchi,et al.  Dynamic-force spectroscopy measurement with precise force control using atomic-force microscopy probe , 2006 .

[10]  Werner Karl Schomburg,et al.  Pressure sensor from a PVDF film , 2008 .

[11]  Stergios Logothetidis,et al.  A comparative study of the nanoscratching behavior of amorphous carbon films grown under various deposition conditions , 2000 .

[12]  Lu Jian,et al.  An Experimental Method for the Detection of Laser-Generated Surface Acoustic Waves with PVDF Transducers , 2007 .

[13]  R. E. Collins,et al.  Piezoelectricity and pyroelectricity in polyvinylidene fluoride—A model , 1978 .

[14]  S. T. Jenq,et al.  Characterization of piezo-film sensors for direct vibration and impact measurements , 1995 .

[15]  Xiaotang Hu,et al.  A differential confocal LG/LD SAW detection system to determine mechanical properties of layered thin films , 2011 .

[16]  Frank Richter,et al.  Investigation of creep behaviour under load during indentation experiments and its influence on hardness and modulus results , 2001 .