论文信息 - Deposition of amorphous fluoropolymer thin films by thermolysis of Teflon amorphous fluoropolymer

Deposition of amorphous fluoropolymer thin films by thermolysis of Teflon amorphous fluoropolymer

Thin films (0.3–5 μm) of an amorphous fluoropolymer (AF) derived from the copolymeric material Teflon AF 1600 were deposited on Si (100) wafers by vacuum pyrolysis. Infrared spectroscopy indicated that the composition of the deposited films was similar to the source material. The deposited films were amorphous by x‐ray diffraction. The surface morphology contained micropores which did not extend through films deposited at a low rate. The refractive index was ∼1.2 at 633 nm. Comparisons are made to films derived from ordinary Teflon (also by pyrolysis). The mechanism for the repolymerization of the Teflon AF copolymer at the substrate surface is discussed.

Toh-Ming Lu | J. A. Moore | T. Lu | J. Moore | T. C. Nason

[1] Adhesion of metals to spin‐coated fluorocarbon polymer films , 1990 .

[2] Chin-An Chang,et al. Effect of Presputtering on the Adhesion of Cu to Teflon , 1987 .

[3] S. Ojha,et al. The properties of fluorocarbon films prepared by r.f. sputtering and plasma polymerization in inert and active gas , 1977 .

[4] L. Holland. Some characteristics and uses of low‐pressure plasmas in materials science , 1977 .

[5] S. Ojha,et al. Sputtered and plasma polymerized fluorocarbon films , 1976 .

[6] Vacuum deposition rate measurements on thin polymer films , 1974 .

[7] H. Giegengack,et al. Investigations of the structure of thin fluorocarbon films by x‐ray diffraction and infrared spectroscopy , 1971 .

[8] R. Silverstein,et al. Spectrometric identification of organic compounds , 2013 .

[9] R. Moynihan. The Molecular Structure of Perfluorocarbon Polymers. Infrared Studies on Polytetrafluoroethylene1 , 1959 .

[10] S. Krimm,et al. Infrared Spectra of High Polymers. III. Polytetrafluoroethylene and Polychlorotrifluoroethylene , 1956 .