论文信息 - Physical origin of suppressed effective work function modulation at boron segregated NiSi∕SiON interface - 字舞流文

Physical origin of suppressed effective work function modulation at boron segregated NiSi∕SiON interface

J. Koga | A. Nishiyama | Y. Tsuchiya | K. Sekine | M. Ogawa | M. Koyama | M. Yoshiki | T. Aoyama | S. Zaima | K. Nakajima | Tomohiro Saito