论文信息 - Si incorporation in Ti1 − xSixN films grown on TiN(001) and (001)-faceted TiN(111) columns - 字舞流文

Si incorporation in Ti1 − xSixN films grown on TiN(001) and (001)-faceted TiN(111) columns

I. Petrov | Jun Lu | L. Hultman | P. Eklund | J. Greene | J. Jensen | J. Rosen | A. Eriksson | O. Tengstrand