Deep hole type pressure adjustable electromagnetic chuck
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A deep hole type pressure adjustable electromagnetic chuck relates to a precise grinding apparatus and comprises an electromagnetic chuck and a fixture. The electromagnetic chuck is provided with electromagnetic chuck edge area holes, electromagnetic chuck central area holes, first exhaust holes and second exhaust holes. The electromagnetic chuck edge area holes are uniformly and symmetrically distributed at edges of the electromagnetic chuck and connected with the second exhaust holes at bottoms thereof. The electromagnetic chuck has four sides, and each side is corresponding to a row of holes communicated with the second exhaust holes at bottom of the electromagnetic chuck and connected to an air pump by the second exhaust holes. The second exhaust holes are correspondingly uniformly and symmetrically distributed at internal part of the electromagnetic chuck. The electromagnetic chuck central area holes are uniformly and symmetrically distributed at central part of the electromagnetic chuck and provided with communication areas at bottoms thereof. The communication areas are communicated with the first exhaust holes and connected to the air pump.