Realization of single-mode telluride rib waveguides for mid-IR applications between 10 and 20 μm.

The feasibility of all-telluride integrated optics devices based on waveguides presenting a single-mode behavior in the spectral range (10-20 μm) is demonstrated. These waveguides are constituted of a several micrometer thick Te(82)Ge(18) film deposited onto a Te(75)Ge(15)Ga(10) bulk glass substrate by thermal coevaporation and further etched by reactive ion etching under the CHF(3)/O(2)/Ar atmosphere. The obtained structures were proven to behave as channel waveguides with a good single-mode transmission over the whole spectral range. These results allowed validating our technological solution for the fabrication of integrated optics modal filters for spatial interferometry.

[1]  G. Parent,et al.  Fabrication and testing of all-telluride rib waveguides for nulling interferometry , 2011 .

[2]  E. Bonhomme,et al.  Transmission measurement at 10.6μm of Te2As3Se5 rib waveguides on As2S3 substrate , 2007 .

[3]  Bruno Bureau,et al.  Purification of Te75Ga10Ge15 glass for far infrared transmitting optics for space application , 2010 .

[4]  Malcolm C. V. Fridlund,et al.  Darwin and TPF: technology and prospects , 2004, SPIE Astronomical Telescopes + Instrumentation.

[5]  A. Pradel,et al.  Deep reactive ion etching of thermally co-evaporated Te-Ge films for IR integrated optics components , 2011 .

[6]  T. L. Myers,et al.  Single-mode low-loss chalcogenide glass waveguides for the mid-infrared. , 2006, Optics letters.

[7]  G. B. Reddy,et al.  GaGeTe films as phase-change optical recording media , 1995 .

[8]  Jacques Lucas,et al.  A Family of Far‐Infrared‐Transmitting Glasses in the Ga–Ge–Te System for Space Applications , 2006 .

[9]  J. Sanghera,et al.  Waveguide amplifiers in sputtered films of Er3+-doped gallium lanthanum sulfide glass. , 2006, Optics express.

[10]  Caroline Vigreux,et al.  Glass formation in the GexTe100−x binary system: Synthesis by twin roller quenching and co-thermal evaporation techniques , 2009 .

[11]  Tigran Galstian,et al.  Fabrication and characterization of integrated optical waveguides in sulfide chalcogenide glasses , 1999 .

[12]  P. Kern,et al.  Modal filtering for nulling interferometry - First single-mode conductive waveguides in the mid-infrared , 2006 .

[13]  Caroline Vigreux,et al.  Effect of composition on the properties of Te–Ge thick films deposited by co-thermal evaporation , 2010 .

[14]  Barry Luther-Davies,et al.  Fabrication and characterization of low loss rib chalcogenide waveguides made by dry etching. , 2004, Optics express.

[15]  Caroline Vigreux,et al.  Fabrication of far infrared rib waveguides based on Te-Ge-Ga films deposited by co-thermal evaporation , 2008, Optical Systems Design.

[16]  Tomas Kohoutek,et al.  Embossing of chalcogenide glasses: monomode rib optical waveguides in evaporated thin films. , 2009, Optics letters.

[17]  Zoran Sodnik,et al.  Nulling interferometer based on an integrated optics combiner , 2004, SPIE Astronomical Telescopes + Instrumentation.