Record wavelength tuning of 127 nm for vertical cavity Fabry-Perot filter

Demonstrated micromechanically tunable Fabry-Perot filters with record electromechanical and optical performance. Wavelength tuning of 127nm applying only 7.3V is achieved. The stop-band of these filters is extremely wide (1250nm - 1800nm). These results open new application fields for micromechanically tunable filters, such as spectrometry for environmental and process analysis, medical diagnostics and colorimetry.