Interferometric displacement sensor made by integrated optics on glass

Abstract Two designs for an interferometric displacement sensor are presented, a new design based on a March-Zehnder interferometer and another based on a Michelson interferometer. The latter is made by potassium ion exchange on glass, and the visibility is measured for sensor-mirror distances up to 4 m. The spectral width and the coherence length of the laser diode are calculated from these measurements.