Modeling of monolithic inductors and transformers for silicon RFIC design

Monolithic microstrip inductors and transformers suitable for RFIC applications have been successfully integrated in a production silicon BiCMOS VLSI technology. A computer program which extracts a physically-based model of the microstrip components suitable for circuit (SPICE) simulation is described. Model accuracy is evaluated for variations in metallization, layout geometry and substrate parameters, and experimental measurements of inductors and transformers fabricated are presented.