论文信息 - Mechanism of fatigue in micron-scale films of polycrystalline silicon for microelectromechanical systems

Mechanism of fatigue in micron-scale films of polycrystalline silicon for microelectromechanical systems

Reported nearly a decade ago, cyclic fatigue failure in silicon thin films has remained a mystery. Silicon does not display the room temperature plasticity or extrinsic toughening mechanisms necessary to cause fatigue in either ductile (e.g., metals) or brittle (e.g., ceramics and ordered mintermetallic) materials.

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