论文信息 - Electron Swarm Characteristics in Gas Mixtures Containing CF4 - 字舞流文

Electron Swarm Characteristics in Gas Mixtures Containing CF4

K. Satoh | H. Itoh | H. Tagashira | Y. Nakao | T. Matsumura | Madoka Inomata | Yoshio Suzuki

[1] Hidehiko Kobayashi,et al. Electron Temperature in RF Discharge Plasma of CF4/N2 Mixture , 1994 .

[2] Yoshitaka Nakao,et al. Electron transport coefficients in SF6 and c-C4F8 mixtures , 1991 .

[3] K. Satoh,et al. Development of electron swarms in SF6 , 1990 .

[4] L. Zarkova,et al. Elastic and inelastic e-CF4 cross sections at low energies: fit to the experimental data , 1988 .

[5] H. Itoh,et al. Electron swarm development in SF6. I. Boltzmann equation analysis , 1988 .

[6] R. D'agostino,et al. Boltzmann equation analysis of the electron gas in CF4 discharge plasma , 1987 .

[7] Mitsuo Shimozuma,et al. Boltzmann equation analysis of electron swarm behaviour in nitrogen , 1986 .