论文信息 - Limitations of interface sharpness in a-Si:H/a-SiC:H multilayers - 字舞流文

Limitations of interface sharpness in a-Si:H/a-SiC:H multilayers

H. Cerva | J. Kolodzey | T. Muschik | B. Scherzer | H. Meyerheim | T. Fischer | R. Schwarz | P. Hanesch