Modeling and Simulation of A Silicon Integration Tri-Axial Piezoresistive MEMS Accelerometer Chip Used for High Impact Test

This paper presents analytical models for tri-axial accelerometer chip based on one seismic mass and eight beams.The model makes it possible to better understand and to predict the behavior of the accelerometer.The accelerometer discussed in this paper was designed to measure inertia force in an arbitrary direction.This paper uses finite element design for optimization of the device structure.FEA software ANSYS was used to simulate the behavior of the accelerometer when it was subjected to inertia force in random direction.We analyses the positions on every beam when the mass subjects different direction acceleration in order to find the suitable position.The FEA software LS-DYNA was used to simulate the accelerometer impacts to the steel wall in random directions.Analysis Results presents that the theoretical structure is feasible.