Method for fabrication of microfluidic systems in glass

In this report we describe a new way of fabricating integrated microfluidic elements in glass. By employing a matrix of underpinning posts and a thin wall, surrounding etched flow channels, an efficient sealing of glass chips substrates to thin cover glass can be accomplished. The use of this arrangement enables the overlay sheath of glass to hermetically close the flow channel by fusion bonding while avoiding problems with void or crack formation that are due to dust particles, non-planarity and differences in thermal coefficient of expansion. As an example a structure with a thin cover glass, useful for studying phenomena in capillary electrophoresis utilizing large numerical aperture microscope lenses, was fabricated.

[1]  D. J. Harrison,et al.  Micromachining a Miniaturized Capillary Electrophoresis-Based Chemical Analysis System on a Chip , 1993, Science.

[2]  A. Manz,et al.  Glass chips for high-speed capillary electrophoresis separations with submicrometer plate heights , 1993 .

[3]  Stephen C. Jacobson,et al.  Open channel electrochromatography on a microchip , 1994 .

[4]  D. J. Harrison,et al.  Capillary electrophoresis and sample injection systems integrated on a planar glass chip , 1992 .

[5]  G. A. C. M. Spierings,et al.  The dissolution of Na2O-MgO-CaO-SiO2 glass in aqueous HF solutions , 1987 .

[6]  J. Michael Ramsey,et al.  Effects of injection schemes and column geometry on the performance of microchip electrophoresis devices , 1994 .

[7]  C. Harendt,et al.  Silicon fusion bonding and its characterization , 1992 .

[8]  D. J. Harrison,et al.  Microchip-based capillary electrophoresis for immunoassays: analysis of monoclonal antibodies and theophylline. , 1997, Analytical chemistry.

[9]  J. Michael Ramsey,et al.  Precolumn Reactions with Electrophoretic Analysis Integrated on a Microchip , 1994 .

[10]  Alvin W. Moore,et al.  Microchip Separations of Neutral Species via Micellar Electrokinetic Capillary Chromatography , 1995 .

[11]  D. J. Harrison,et al.  Integrated capillary electrophoresis devices with an efficient postcolumn reactor in planar quartz and glass chips. , 1996, Analytical chemistry.

[12]  A. Woolley,et al.  Ultra-high-speed DNA sequencing using capillary electrophoresis chips. , 1995, Analytical chemistry.

[13]  M. A. Northrup,et al.  Functional integration of PCR amplification and capillary electrophoresis in a microfabricated DNA analysis device. , 1996, Analytical chemistry.

[14]  J. Michael Ramsey,et al.  Microchip Capillary Electrophoresis with an Integrated Postcolumn Reactor , 1994 .

[15]  G. Spierings.  Compositional effects in the dissolution of multicomponent silicate glasses in aqueous HF solutions , 1991 .

[16]  B. Puers,et al.  Characterization of the electrostatic bonding of silicon and Pyrex glass , 1995 .

[17]  S. Jacobson,et al.  High-Speed Separations on a Microchip , 1994 .

[18]  Richard A. Mathies,et al.  Capillary array electrophoresis using laser-excited confocal fluorescence detection , 1992 .

[19]  Andreas Manz,et al.  Manipulation of Sample Fractions on a Capillary Electrophoresis Chip , 1995 .

[20]  J. Courtney Davidson,et al.  Examination of glass-silicon and glass-glass bonding techniques for microfluidic systems , 1995, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[21]  D. J. Harrison,et al.  Micromachining of capillary electrophoresis injectors and separators on glass chips and evaluation of flow at capillary intersections , 1994 .