论文信息 - CMOS-embedded lasers for advanced silicon photonic devices

CMOS-embedded lasers for advanced silicon photonic devices

Realizing CMOS-compatible integrated lasers on silicon is a crucial step towards cost-efficient, high-functional optoelectronic integrated circuits (OEICs). Here, we report on a concept to embed active optical devices based on a bonded III–V epitaxial layer stack between the FEOL and BEOL of a CMOS silicon photonics chip. Ultra-shallow laser devices are realized with this concept and optically-pumped lasing, coupled to silicon is demonstrated for the first time with such a concept.

[1] Lukas Czornomaz,et al. Towards large size substrates for III-V co-integration made by direct wafer bonding on Si , 2014 .

[2] Amnon Yariv,et al. Adiabaticity criterion and the shortest adiabatic mode transformer in a coupled-waveguide system. , 2009, Optics letters.

[4] Richard J. Black,et al. Tapered single-mode fibres and devices. I. Adiabaticity criteria , 1991 .

[5] J. Bowers,et al. Electrically pumped hybrid AlGaInAs-silicon evanescent laser. , 2006, Optics express.

[6] Omri Raday,et al. A hybrid AlGaInAs-silicon evanescent waveguide photodetector. , 2007, Optics express.

[7] Thomas Ferrotti,et al. 1310 nm hybrid InP/InGaAsP on silicon distributed feedback laser with high side-mode suppression ratio. , 2015, Optics express.

[8] Di Liang,et al. A distributed feedback silicon evanescent laser. , 2008, Optics express.

[9] Min Yang,et al. A 90nm CMOS integrated Nano-Photonics technology for 25Gbps WDM optical communications applications , 2012, 2012 International Electron Devices Meeting.