Photolithography Fabricated Spacer Arrays Offering Mechanical Strengthening and Oil Motion Control in Electrowetting Displays

Introducing spacers into pixelated electrowetting displays (EWDs) normally gives mechanical strengthening, while bringing undesired disturbance of water/oil interfacial dynamics. Hence, spacer array is a key pixel structure needs careful consideration in the design and fabrication of electrowetting displays. Here, we propose a spacer array, which is designed standing on the junction of adjacent pixel walls, fabricated by photolithography. The spacer array provides mechanical strength enhancement and reliable oil motion controllability. By optimizing the spacer distribution density, the EWD device may achieve 28% increase in open ratio (white area fraction) and withstand 60 N/mm2 pressure. This design of spacer array reasonably solves the contradiction between mechanical strength enhancement and optoelectronic performance in EWDs, providing potential applications in oil–water two-phase microfluidic devices.

[1]  M. Madou,et al.  Increased graphitization in electrospun single suspended carbon nanowires integrated with carbon-MEMS and carbon-NEMS platforms. , 2012, ACS applied materials & interfaces.

[2]  Biao Tang,et al.  Novel Driving Methods for Manipulating Oil Motion in Electrofluidic Display Pixels , 2016, Journal of Display Technology.

[3]  Glen McHale,et al.  The use of high aspect ratio photoresist (SU-8) for super-hydrophobic pattern prototyping , 2004 .

[4]  Wei-Yuan Cheng,et al.  3D electrohydrodynamic simulation of electrowetting displays , 2014 .

[5]  R. Lecomte,et al.  Passivation of KMPR microfluidic channels with bovine serum albumin (BSA) for improved hemocompatibility characterized with metal-clad waveguides , 2012 .

[6]  Qing Zhao,et al.  Simplified dynamical model for optical response of electrofluidic displays , 2017, Displays.

[7]  F. Mugele Fundamental challenges in electrowetting: from equilibrium shapes to contact angle saturation and drop dynamics , 2009 .

[8]  Hui Li,et al.  Oil Motion Control by an Extra Pinning Structure in Electro-Fluidic Display , 2018, Sensors.

[9]  B. J. Feenstra,et al.  Video-speed electronic paper based on electrowetting , 2003, Nature.

[10]  J. Baret,et al.  Electrowetting: from basics to applications , 2005 .

[11]  Tao He,et al.  Screen-printing fabrication of electrowetting displays based on poly(imide siloxane) and polyimide , 2015, Displays.

[12]  Lingling Shui,et al.  Particle directed dual-fluid flow driven by electrowetting for controllable multiway light valves , 2018, Applied Physics Letters.

[13]  Guofu Zhou,et al.  Microfluidics for electronic paper-like displays. , 2014, Lab on a chip.

[14]  C. Greiner,et al.  SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography , 2007 .

[15]  Tim Koch,et al.  Review Paper: A critical review of the present and future prospects for electronic paper , 2011 .

[16]  D. Broer,et al.  Forming Spacers in Situ by Photolithography to Mechanically Stabilize Electrofluidic-Based Switchable Optical Elements , 2016, Materials.

[17]  Jason Heikenfeld,et al.  Intense switchable fluorescence in light wave coupled electrowetting devices , 2005 .

[18]  Yan Tu,et al.  Investigation of oil‐motion non‐uniformity in a reflective display based on electrowetting , 2010 .

[19]  Andrea Giraldo,et al.  46.3: Improved Oil Motion Control and Hysteresis‐Free Pixel Switching of Electrowetting Displays , 2012 .

[20]  Andrew J. Steckl,et al.  Electrowetting on Flexible Substrates , 2012 .

[21]  Li Wang,et al.  Review of Paper-Like Display Technologies (Invited Review) , 2014 .

[22]  Lingling Shui,et al.  Two-phase microfluidics in electrowetting displays and its effect on optical performance. , 2016, Biomicrofluidics.

[23]  Xiao Tao Li,et al.  Effect of Pixel Shape on Fluid Motion in an Electrofluidic Display , 2014 .

[24]  Robert A. Hayes,et al.  Amorphous fluoropolymers as insulators for reversible low-voltage electrowetting , 2001 .