A review on mems based vibration energy harvester cantilever geometry (2015–2020)

Abstract The paper focusses selected significant works carried out in the area of vibration energy harvesting. Micro electromechanical systems, generally referred as MEMS, are established using integrated technology on micro scale. They are a mixture of electrical, electronics and mechanical elements. MEMS finds application in extensive areas but its applications in vibration energy harvesting are most popular. The paper emphasises on the various cantilever geometries for vibration energy harvesting reported in literature for the past five years. In particular the progress made by the researchers with respect to cantilever geometry are reviewed.