论文信息 - Dual-wavelength heterodyne differential interferometer for high-precision measurements of reflective aspherical surfaces and step heights.

Dual-wavelength heterodyne differential interferometer for high-precision measurements of reflective aspherical surfaces and step heights.

A dual-wavelength heterodyne differential interferometer was developed and tested together with scanning mechanics. To extend the range of unambiguity, two wavelengths were applied. This is important for measuring structures with surface discontinuities (reliefs, steps). The automatic adjustment of the interferometer with respect to the rotational symmetrical measuring surfaces (aspheres) is important. An adjustment is needed to scan the asphere through its vertex. Typical measurements on a sphere, an asphere, and steps are shown.

[1] Hans J. Tiziani,et al. On the application of synthetic holograms for testing aspheric surfaces , 1984 .

[2] G E Sommargren,et al. Optical heterodyne profilometry. , 1981, Applied optics.

[3] A F Fercher,et al. Rough surface interferometry with a two-wavelength heterodyne speckle interferometer. , 1985, Applied optics.

[4] B Dorband,et al. Testing aspheric surfaces with computer-generated holograms: analysis of adjustment and shape errors. , 1985, Applied optics.

[5] Hans J. Tiziani. Prospects Of Testing Aspheric Surfaces With Computer-Generated Holograms , 1981, Other Conferences.

[6] J. Wyant,et al. Contouring Aspheric Surfaces Using Two-wavelength Phase-shifting Interferometry , 1985 .

[7] M. Camac,et al. Absolute distance measurements by variable wavelength interferometry. , 1981, Applied optics.

[8] R. Dändliker,et al. Two-wavelength laser interferometry using superheterodyne detection. , 1988, Optics letters.

[9] H J Tiziani,et al. Two-wavelength double heterodyne interferometry using a matched grating technique. , 1991, Applied optics.

[10] J C Wyant,et al. Testing aspherics using two-wavelength holography. , 1971, Applied optics.

[11] Milton Gottlieb,et al. Electro-Optic and Acousto-Optic Scanning and Deflection , 1983 .

[12] C Polhemus,et al. Two-wavelength interferometry. , 1973, Applied optics.